??????? ??????? ?????? ????? ?? ????? ???????? ??????????? ??????? ???? ????? ????? ?? ???????? ???? ???? ???? ?????? ???? ???. ??? ???? ??????? ?? ????? ??? ???????? ?????? ????? ?? ?????? ???????? ????????? ??????? ????????? ??????? ??????. ????? ??? ???????? ????? ??????? ???????? ?????? ????????????? ??????? ????????? ???????. ?? ??? ??? ???????? ?? ?????? ?????? ??????? ?? ???? ?????? ?? ???? [1].
???? ?????? ??????? ?? ?????? ??? ????? ????? ??? ??????? ????? ?????? ????? ???????? ???????? ????. ??? ????? ??? ??????? ?????? ????? ????? ?????? ???? ???????? ?????? ???? ?? ???? ??????? ??????????? ????? ???????? ??????? ?????? ???????. ???? ????? ??????? ???????? ?????? ????? ?????? ???? ????? ????? ??? ????????? ?????????.
???????? ??? ???? ??????? ????? ??????? ????? ?? ????? ????? ?????? ???? ???????? ??????? ???????? ???????? ?????? ?? ?????? ??????? ?? ??????. ??? ???? ?? ????? ??????? ??????? ??????? ?????? ??????? ???????? ?????? ??????? ???????. ?????? ???? ???????? ???? ?????? ?? ??????? ??????? ??????? ??????? ?????? ??????? ???? ????? ??? ??????? ??????? ???????.

??????? ????? ??? ???????
?????? ??? ????? ????? ??? ??????? ????? ??? ??? ???????? ???????? ???? ??????? ??? ??????? ??? ???? ?? ??????. ?????? ?????? ???????? ??????? ??????? ??????? ?? ????? ISO 14644-1 ???? ???????? ????? ???? ???? ?????? ????????? ???????? ????.
??? ????? ???? ISO ???? ??????? ???? ???? ????? ??? ??????: ISO 1 ??? ISO 9. ???? ????? ??? ????? ???? ???? ?????? ????. ???? ?????? 9 ???? ????? ?????? ?????? ?????? ?????? ??????? ??????? ????? ???? ?????? 1 ???? ????? ?????? ?????? ?????? ?? ????? ????? ???????? ???????? [2]. ????????? ?????? ?????? ????????? ?? ????? ?? ???? ??????? ?? ISO 8 ?ISO 7 ?ISO 6 ?ISO 5.
??? ???????? ????? ???????
????? ??? ??????? ??? ??????? ???????? ??? ??? ???????? ???????? ???? ?? ????? ?????? ?? ??????. ??? ???????? ?????? ???????? ???? ??? ????? ?? ????? ??????? ?? 0.5 ????????.
?????? ???? ?????? ????? ??????? ???????? ??????? ??? ?????? ?? ??????? ??? ??????? ??? ????? ????? ??????.
| ??? ISO | ???? ?????? ???????? ≥0.5 ???????? ??? ??? ???? | ?????? ?????? ????????? ?? ?????? | ????????? ????????? |
|---|---|---|---|
| ISO 8 | 3,520,000 | 10-20 | ??????? ?????? ????? |
| ISO 7 | 352,000 | 30-60 | ????? ??????? ?????? |
| ISO 6 | 35,200 | 90-180 | ????? ???????? ??????? |
| ISO 5 | 3,520 | 240-480 | ??????? ?????? ????? |
???? ??????? ISO 8
??? ????? ?? ?? ???? ??????? ISO 8 ???? ????? ?? ??? ????????? ??????? ????????? ?? ????? ??????? ??????? ???????? ??? ???? ?? ???? ???? ???? ???? ?? ?????? ??????? ???? ?????? ???????? ???????? ???????.
??????? ???????
?????? ?????? ??????? ????? ??????? ISO 8 ?? ??? ??? 3.52 ????? ???? ??????? ?? 0.5 ???????? ??? ??? ??? ??? ???? ?? ??????. ?????? ??? ??????? ?? 10 ??? 20 ??????? ?????? ?? ?????? ???????? ????? ??????? ???????? ??????? ??????? HEPA. ????? ??? ??? ????? ??????? ??? ???? ???? ???? ??????? ???????? ??????? ???? ????? ???.
????????? ???????? ?????????
????? ?? ??????? ????? ??????? ISO 8 ??? ?? ???? ?? ??????? ????? ???? ????? ??? ???? ?????? ?? ?????? ?? ??????. ??????? ????? ISO 8 ???? ???? ?? ????? ????????????? ???????? ??? ????? ???????? ????????? ??????? ????? ???????? ??????????.
???? ????????? ????? ?????? ???????? ???? ??????? ?????? ????. ??? ???? ??????? ???? ????? ????? ??????? ??? ?????? ?? ????? ISO 8 ??????? ?????? ??????? ?????? ?????.
??? ISO 8 ?? ??????? ?????? ?? ??????? ??????
????? ?? ??? ????? ??? ??? ??????? ?????? ISO 8 ??????? ?? ????? ???????? ??????????? ???? ?? ????? ??????? ?????? ????? ???? ???? ?? ??????? [3]. ????? ??????? ??? ??? ???? ????? ???????? ?????? ???????? ?????? ?????? ??????? ??????.
????? ????????? ?????? ?????? ?????? ISO 8 ?????? ???? ????? ??????? ?????? ?? ????? ???????? ???????? ??? ????? ?????? ??? ????? ??????? ???????? ?????.
??? ??????? ISO 7
??? ???? ????? ???? ??????? ISO 7 ???? ????? ????? ?? ???? ??????? ISO 8. ??? ??????? ??? ??????? ??? ???? ???? ?? ??????? ????? ?????? ???????? ??? ???? ??????? ??? ?????? ???? ?????.
??????? ???????
???? ??? ?? ???????? ???? ???? ???????? ??? ?? ????? ??????? ISO 7 ?? 352,000 ???? ???? 0.5 ???????? ?? ????? ??????. ????? ???? ??????? ??? 30 ??? 60 ??????? ?????? ?? ?????? ?? ??? ?????? ??? ??? ??????? [4].
??? ?? ????? ???? ISO 7 ????? ?? ??????? ??????? ?????? HEPA. ????? ???? ??????? ??? ????? ????? ?? ?????? ?????? ?????? ?? ????? ????? ?? ???? ????? ???? ?????? ???????.
??????? ?? ??????? ??????
?? ??????? ???? ???? ?? ???? ???? ?????? ???? ????? ??? ????? ?? ??????? ????????? ???? ????? ISO 7 ???? ??????. ??? ????? ??????? ?????? ?? ??? ISO 7 ??????? ?????? ?????? ??? ??? ??????? ??????? ????? ????????? ??????? ???????.
?????? ????? ????? ??????? ???????? ????? ?? ????? ISO 7 ?? ????? ???????? ??????? ????? ??????? ????????.
???????? ??? ??????? ??????
???? ????? ?????? ?? ???????? ???????? ????? ??? ????? ????? ????? ?? ???? ????? ??? ???????? ???????? ISO 7. ??? ??? ????? ?????? ???????? ???? ??????? ?? ?????? ??????????? ????? ?? ?????? ?? ?????? ??????????? ????? ?????? ????? ????????.
????? ?? ??? ????? ??????? ?????? ??????? ?????? ?? ???????? ????????. ??? ????? ??????? ?? ???? ????? ????? ??? ????? ?????? ????????? ???????? ??? ?????? ????? ??????? ?? ?????? ???????.
???? ??????? ISO 6
???? ??? ???????? ???? ??? ??????? ISO 6 ????? ???? ?? ??????? ????? ??????. ??? ????? ??? ?????? ??? ??? ???????? ???? ????? ??????? ?????? ?????? ?? ????????.
??????? ???????
???? ???? ?????? ???? ???????? ???? ???? 0.5 ???????? ??? ??? ???? ??????? ?? ?? ???? ??????? ISO 6 ????? 35,200. ???? ????? ??? ?????? ?? ???? 90-180 ????? ???? ?? ??????.
????? ???? ?????? ?? ??? ??????? ISO 6 ????? ???? ??? ?????? ????? ?? ????? ?????? ?????? ?????? [5]. ??????? ????? HEPA ?????? ????? ????? ?? ????? ?? ???? ??????? ?????? ????? ????? ????? ???? ?????? ?????? ???????.
????????? ??????? ????? ?????
?????? ?? ????? ???????? ???? ???? ?????? ????? ????? ??????????? ?????? ?????? ??????? ??????? ??? ????? ISO 6. ??? ???????? ????? ???? ????? ???????? ???? ?? ???? ????? ??? ?????? ?????? ?? ??????? ????????? ?? ??? ????? ???????.
??????? ?????? ?? ?? ???? ISO 6
????? ?????? ??????? ?????? ?? ??? ????? ISO 6 ???? ??? ??????? ???? ????? ?? ????? ????? ????????. ?? ???? ????????? ????? ?????? ?????? ????? ????? ???????? ????????? ?????? ??????? ???????? ??? ?????? ????? ??????. ???? ????? ??????? ?????? ??????? ??? ?????? ???? ISO 6 ????? ???? ??????? ???????? ????????? ??????.
??? ??????? ISO 5
??? ???? ?????? ????? ??? ??????? ISO 5 ????? ?? ???? ?????? ???? ??? ?????? ???? ?????? ?? ????? ???????. ??????? ??? ??????? ?? ???????? ???? ???? ???? ???? ?????? ??? ??????.
??????? ???????
???? ???? ??????? ISO 5 ??? ???? 3520 ???? ???? ??? ??? ????. ?????? ????? ??? ??????? ????? ???? ???? ??????? ????? ?????? ???? ?????? ?????? ??? ???? ??? ???? ?????.
???? ??? ???? ?????? ?????? ???????? ?? ????? ???????. ????? ??? ??????? ??? ???? ?? 240 ????? ????? ???? ?? ??????.
??????? ??????? ??????
????? ????????? ?? ????? ??????? ?????? ISO 5 ?? ????? ????? ????????? ?????? ??????? ?????? ??????? ?????? ?????? ???????? ??????????????? ??????? [6]. ????? ?????? ?? ?????? ????? ?????????? ?????????? ??????? ????? ????? ISO 5.
?????? ??? ??????? ?????? ?? ISO 5
???? ???? ?? ????? ??????? ??????? ?????? ?? ???? ????? ISO 5. ??? ????? ????? ???????? ??????? ?? ?????? ?????? ????? ??????? ??? ???? ??????? ???? ????? ????????? ?????? ?????. ???? ????? ????? ??????? ?????? ???? ??? ????. ??? ??? ?????? ?? ?????? ?? ????? ?????? ???????? ???? ???????? ??? ??????? ?? ??????? ???????? ??????? ?? ????? ???????.
??? ???? ???? ????? ??????? ???????
???? ????? ????????? ????? ??? ????? ???? ????? ??? ????????? ?? ????? ??????? ?????? ??????? ?????? ??? ????? ??????? ????? ???? ?????? ?????? ?????? ??????. ??? ?? ???? ??????? ???? ?? ????? ?????? ??? ?????? ???????? ??? ?????? ?? ???? ??????? ??????.
??????? ????? ??????
????? ????? ????? ??????? ????? ??? ????? ?????? ????? ??? ???? ??????. ???? ??? ??????? ??????? ??? ???? ?????? ??? ????? ???????? ????? ????? ???????. ????? ????? ?????? ??? ???? ????? ??? ??? ???????? ?????? ???????.
??? ?????? ?? ???? ?????? ?????. ????? ?? ??? ??? ???? ??????? ???????? ?????????? ???????? ??? ???? ??????? ??? ????? ???? ????? ???????.
????? ???????
???? ????? ??????? ??????? ?????? ????????? ?? ????? ??????? ?????? ?????? ????????. ????????? ????? ???????? ?????? ????? ?? ??????? ??????? ?????? ????? ???? ??????? ?????? ?????? ??????.
??? ????? ????? ??????? ????? ?????? ????? ?? ???? ???????. ???? ????????? ?????? ??????? ???????? ??? ???????? ?? ????? ??????? ???????? ??? ?????? ??? ???? ???? ?????? ?? ?????.
??????? ??????? ???????? ?????? ?????? ????????
??????? ???????? ?????? ?????? ?? ??????? ?????? ????? ?? ??? ???????. ??? ?? ???? ????? ??????? ???????? ?????? ?????? ????? ??? ????? ???? ?????? ?? ?????? ?????? ???? ???? ?? ?????? ??? ???? ????? ?????? ????? [7].
????? HEPA ????? ?? ????? ?????? ???? ?????? ???????? ???????? ???? ??? ?????? ??? ????? ???????. ???? ????? ???????? ???????? ??? ???? ???? ??????? ??? ??? ?????? ???? ??? ???????? ???????? ?? ??????.
?? ?? ??????????? ?????? ?? ?????? ???? ??? ?? ??????? ??? ??????? ?? ??? ??????? ?? ??? ??????? ???????
?? ????? ???????? ??????? ?????? ??? ????? ??????? ????? ?? ????? ????? ??? ????????? ?????????. ??? ???? ??? ??????? ?????? ???? ?? ???? ???????? ??? ?? ??? ????? ????????? ????????.
??????? ???????? ???? ?? ??? ??????. ?????? ???????? ??????? ????? ???? ???? ???? ?????? ????? ???????? ??? ???? ???? ???????. ???? ?? ???? ??? ????? ????? ????? ??????? ?????? ?????? ?????.
????? ?????? ?????? ??????. ??? ????? ????????? ??????????? ???????? ???? ?? ?????? ????? ???? ??????. ??? ????? ?????? ??????? ??????? ??? ???????? ?? ?????? ???????. ???? ????? ???????? ??????? ???? ?????? ???????? ?? ????? ???????? ?? ?????? ??? ????? ?????? ??????? ???? ???????. ???? ????? ?????? ??? ??????? ????? ?? ???? ??? ????? ??????? ??????.
???? ?? ??? ??????? ???????? ??????? ????? ??? ???????? ??????? ??? ???? ??? ????? ?????? ?????? ????? ?????? ?????? ????? ?????.
???????
[1] ??????? ?. (2025? 3 ?????? 2025) ?? ?? ??? ??????? ?????? ?? ??? ????????
[2] ??? (2026) ?? ??????? ?????? ?? ???? ?????.
[3] BHM (2025? 13 ?????? 2025) ?? ?? ?????? ?????? ?????? ????? ?? ????? ????? ??????? ?? ????? 8 ISO?
[4] ??????? ?. (2024? 7 ????? 2024) ??????? ???????? ??????? ISO 7 ???? ??????? ISO 7 ??????? ??????.
[5] ????? (2026). ?? ?? ??????? ??? ??????? ?? ????? ??????
[6] Allied Cleanrooms (2024? 8 ?????/?????). ?? ?? ??? ??????? ISO 5? ???? ?????????.
[7] ?????? (2025). ???? ??????? ???? ????? ???????.









