?? ????? ???? ?????? ???????? ??????? ??????????? PVD ??? ??????? ????????? ????? ?? ????? ??? ???? ?????? ?????? ???????. ?????? ?? ???? ?????? ?????? ?????? ???????? ??????? ???????? ?????? ??? ??????? ??? ????? ??????? ?????? ???????? ??????? ??????? ??? ??? ???? ??? ?????? ??????? ????? ????? ??? ???? ???? ?????? ??????. ???? ????? ?? ??? ????? ????? ?? ??? ?????? ?????? ???? ?????? ??? ?????? ??????? ????? ??? ????? ??????.
??????? ?????? ??????? ??????? ?? ????????? ?? ????? ??????? ??? ????? ????? ????? ?????? ?????????? ????????? ??????? ?? ???? ?????????? ?????? ??? ?? ???? ?? ???????? ??????? ????? ?????? ??????? ????? ?????? ??? ???????? ???? ??? ??????? ???????? ??????? ??? ????? ??????. ???? ??? ?????? ??? ????? ?????? ?????? ????? ??? ??? ????? ????? ?????? ???? ??????? ?????? ???????? ????? ????? ????? ??????? ??????? ?? ??????.

?? ?? ?????? ????????? ?????? PVD ???? ??? ?? ??? ???????? ??????? ??????? ????????
??? ?? ???? ?????? ?????? ??????? ??????? ??????? ??? PVD ???????? ???????? ???????? ???? ??? ??????? ????????? ?????????? ???? ?? ????? ?? ????? ????. ????? ??????? ???? PVD ???????? ???????? ?????? ?? ?????????:
- ???????? ???????: ????? ??????? ?????? ????? ?????? ?????? ????? ???????.
- ???????? ????????: ?????? ?? ????? ??? ???? ???????? ???? ??? ?????? ???? ?????? ?????? ????? ???????? ?? ???????? ????? ?????? ????? ??????? ??????.
- ????????????: ??????? ?? ????? ???? ???????? ?????? ??????? ????? ??????? ???????? ???????? ??? ???? ??????.
??? ?? ??? ?????? ?????? ????????? ?????????? ?????? ????? ???????? PVD ???? ??????? ??? ??? ?????????? ???? ???? ???????? ??????? ?????? ?? ?????? ?????? ?? ???????? ??????? ?? ?? ??? ??? ??????.
?????? ????????? ???????? ????? ???? ??????? ???????? ??????????? ????????? - ????? ????? ??????
??? ????? ?? ??????? ?? ????????? ??? ???? ?????? ?? ????? ???????. ???? ????? ??????? ?? ??????? ?????????? ?????? ?? ????? ???? ?????? ?????? ????? ??? ??? ??????? ?????? ????:
????? ??????
?????? ????? ?????? ?? ?? ????? ????? ??? ?????? ??? ???? ??? ?? ???? ??????? ?? ?? ???? ??? ???????? ????? ???? ???? ???? ????? ?????????. ???? ???? ???? ??? ?? ?????? ??????? ?? ??? ???? ??? ???? ?????? ?????. ??????? ?? ??? ?????? ???? ????? ????? ???? ??????? ??????? ???????? ????? ????????? ????? ????? ??? ?? ????? ?? ????????? ??????? ?? ????? ????????.
???? ???????
??????? ??????? ?? ?????? ?????????? ?? ?? ???? ???? ?????? ????? ?????? ????? ?????? ?????? ?? ????? ??? ??????? ????. ????? ??? ???????? ????? ????? ????? ???? ???? ??? ?????? ?????? ??????? ???????? ???????.
????? ????? ?????? ???????? ??????? ???????? ??? ????? ??????
???? ???? ????? ?? ?????? ?????? ??? ????? ?????? ???? ???? ???? ?????? ?? ????? ???????. ???? ???? ????? ??????? ?? ???????? ??? ??? ???? ????? ?????? ?????? ?????:
?????? ???? ?????? ?? ?????? ???????? ?????? ?????? ??????? ???? ???????? ???? ?????. ???? ???????? ??? ?? ???? ???? ??? ???????? ?? ?????? ????? ????? ????? PVD. ??? ???? ??????? ???? ?? ???? ??????? ??? ??????? ???? ?? ??????? ???????? ??? ?????? ??????? ?? ?????? ????????? ?? ??????? ?????? ?? ??????? ????????. ????? ???????? ???????? ?? ?????? ????????. ?? ?????? ???????? ?? ????? ????????? ??? ?? ???? ?????? ?? ??????? ?????? ??????? ??? ???? ?? ???? ???????? ?????? ??? ???? ?????? ?????????? ??? ????? ??????.
???????: ???? ??????? ??????? ????? ???????. ??????? ?? ???? ????? ??????? ≥98% ??????? ???????. ???? ?????? ???????? ?????? ??????? ???????? ??? ????? ?? ???? ??????? ????? ???????? ??? ???? ????? ??? ???????? (??????? ????????? ???? ???? ?????? ????? ??? ?????? ??? ???? ??????).
???? ??????: ????? ??? ???????? ???????? ??? ??? ????? ??? ????? ??????. ???? ?? ???? ??? ???????? ?????? ???????? ??? ???? ?????? ?????? ??????? ?? ??? ?? ????? ???????? ?????? ?? ??? ????????? ?? ????? ?? ???? ????? ???? ??? ???????.
???????: ?? ??????? ???? ???? ??????? ?? ??????? ?????? ?????? ?????? ??? ??????? ??? ?????? ???? ??? ??????? ??? ????? ?? ???????? ??? ?????? ?? ????? ?????? ???? ??? ??????? ?? ?????? ??????? ????????.
????? ?? ???? ????? ???? ?????? ?????????? ?????? ????? ???????? PVD
????? ????? ?????? ?????? ??????? ??? ???? ???? ???? ??? ????? ????? ??? ?????? ???? ??? ????. ????? ????? ?????? ???????? ?????? ???????? ?????? ??? ????? ????? ??? ????? ????.
???? ???? ?????? ??????? ??????: ?????? ?? ????? ??????? ????????????? ?????? ???? ???????? ????? ????? ?????. ??? ????? ???????? ??? ta-C (??????? ????? ?????? ??? ????????) ???????? ??????? ???? ??????? ???????? ??????? ?????? ?????? ?? ????????? ??????.
???????????? ???????? ???????: ????? ???????? ??????? ?????? ?????? ?? ????????? - ??????? Al ??????? ??????? ??????? ??????? ???? ????????? ??????? ???????? ????????? ???? Au ????? ??? ??? ??????? ???? ????? ?????? ???????? ???? ?????? Cr ????? ???? ??????? ??????? ?????? ???? ????? ?? ???????.
???????? ???????: ????? ????????? ???????? ??????? ???????? ??????? ????? ??????? ??????? ?? ??????? ?????? ?????? ?????? ??? ????? ???? ????? ????? ???????? ????? ????? (TiO2 ?ZnO ??????) ??? ?????? ?????? ?????. ??? ?????? ?? ????? ???? ??? ??????? ??????? ?????? ?? ?????? ????? ???????.
?????? ?????? ????????? ???????? ???????? ??????: ?????? ?? ????? ???????? ??????? ?????? ?? ???????? ?????????? ?????? ??????? ?????? ????????. ???????? ???? ??? ITO ??? ???? ???? ?? ??????? ??????? ???????? ????? ????? ??????? ????? ??? CIGS ?? ??????? ??????? ??????? ????? ?????? ?? ???? ?????? ???????. ???? ?? ????? ?? ???? ?????? ??????? ??? ?? ???? ??????? ??????? ?? ?????? ??????? ?? ?????? ???? ?????? ?????? ?????????.
?? ???? ???? ??? ?? ???? ???? ??????? ???????
?????? ????? ??????? ????????? ??????? ??? ????? ???????? ????????? ????? ??? ???? ?? ???? ??? ?????? ??????. ????? ??? ?????? ?? ?? ?????? ????? ?? ???? ????? ???? ???? ???? ?????? ?????? ???? ????? ?? ????????? ?????????? ??? ??????? ????? ????????? ????????? ?????? ?? ????? ???????.
????? ????? ??? ??? ??????? ??????? ?????? ???????? - ?? ?????? ??? ?????? ?????? ???????? ????????? ????? ?????? ????? ????????? ?????? ?????? ???? ???? ??? ?????? ?? ??? ????? ??????? ??????? ??????????. ??? ????? ??? ?????? ????? ??????? ?? ??????? ???? ?? ??????? ????? ??? ????? ?? ??????? ??? ????? ??????? ?????? ????????? ?????? ?????? ??? ????? ??? ?????? ???????? ????? PVD.
??????? ???????? ??? ?????? ???? PVD
???? ?? ???? ?????? ??? ???? ???????? ??????? ??? ?????? ????? PVD ?????? ??. ???? 5 ????? ?????? ??? ??????:
- ??????? ??? ????? ??? ?????? ???? ???????. ?? ?? ??? ?????? ?????? ??????? ?????? ???????? ???????? ??????? ???????? ???????? ?????? ???????? ??? ?? ???? ??? ???? ????? ???? ???? ?????? ??? ???????.
- ????? ??????? ??????. ???? ?? ???? ??? ??????? ??????? ?? ????????? ????????? ???????? ?? ??????? ??? ????? ????? ?????? ?????? ???????? ??? ??????? ???? ??? ?????? ???? ???? ????? ??? ????.
- ????? ?? ?????? ?? ????? ????? ???????. ??? ?????? ????? ?????? ?? ??????? ?????????. ??? ???? ??????? ?????? ?? ????? ?????? ??????? ??????? ??????? ??????? ?? ?????? ?? ??????? ??????? ???????? ???? ?????? ?????? ??????? ??? ?????? ?? ?? ????? ????????.
- ??? ?????? ???????? ?????? ?????? ????????. ??????? ??????? ???????? ?????????? ?????? ??????????? ???????? ??? ?????? ?? ?????? ????? ?? ??????? ??? ??????? ??????? ???? ???? ?????? ?????????? ?????? ?????? ??? ???????? ?? ??????? ????????.
- ????? ?? ?????? ?????? ???????? ??? ?????. ???? ??????? ??????? ???? ??? ?????? ??? ????? ??? ???????? ???? ?? ???????? ????? ?? ????? ???????? ???.
????? ?????? ??? ???? ?????? ?????????? ?????? ????? ????????
?? ????? ?? ????? ?? ???? ?????? ???????? ???????? ??????????? ??????? ????? ?????? ?????? ???????? ??????? ?? ?? ?? ??????? ??????? ?????? ??????? ?????????. ?????? ??????? ??????? ?? ?????? ??? ???????? ??? ??????? ?????? ????????? ??????? ?????? ?? ???? ?? ???? ????? ??? ?????? ?????? ?? ??????? ????????.









